NANO PRO™ 5 x 5 x 0.5 mm P Type (B-doped) SEMI Standard Prime Grade Silicon Wafer , 10-20 ohm-cm, Single Side Polished
Product SKU#: WA0820
Product Specifications
- Material: Single Crystal Silicon Wafer Substrate
- Growth Method: MCZ
- Orientation:
- Dimension: 5 x 5 mm +/- 0.1 mm
- Thickness: 525 um +/- 20 um (SSP)
- Type/ Dopant: P/ Boron
- Thermal Expansion Coefficient: 2.6·10-6°C -1
- Electrical Resistivity: 10-20 ohm-cm
- Oxygen Content: 1.6 x 10^18 atoms/cm3
- Carbon Content: 0.5 ppm
- Front Surface: CMP Polished, Ra
- LPD & COP Particles: =0.3 um size
